1.Kien HT, Ham VC, Phuc PH. Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator. Vietnam J. Mech. [Internet]. 2018 Dec. 27 [cited 2025 Nov. 8];40(4):397-06. Available from: https://vjmech.vast.vn/vjmech/article/view/13215