Huy, Vu Le, and Shoji Kamiya. “A Direct Evidence of Fatigue Damage Growth Inside Silicon MEMS Structures Obtained With EBIC Technique”. <i>Vietnam Journal of Mechanics</i> 36, no. 2 (June 10, 2014): 109–118. Accessed November 8, 2025. https://vjmech.vast.vn/vjmech/article/view/3376.