HUY, Vu Le; KAMIYA, Shoji. A direct evidence of fatigue damage growth inside silicon MEMS structures obtained with EBIC technique. <b>Vietnam Journal of Mechanics</b>, Hanoi, Vietnam, v. 36, n. 2, p. 109–118, 2014. DOI: 10.15625/0866-7136/36/2/3376. Disponível em: https://vjmech.vast.vn/vjmech/article/view/3376. Acesso em: 8 nov. 2025.